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  4. Silicon Carbon Alloys produced by VHF and Conventional PECVD. A Comparison of their Properties
 
research article

Silicon Carbon Alloys produced by VHF and Conventional PECVD. A Comparison of their Properties

Crovini, G.
•
Demichelis, F.
•
Pirri, C. F.
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1994
MRS Symp.
  • Details
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Type
research article
DOI
10.1557/PROC-336-481
Author(s)
Crovini, G.
Demichelis, F.
Pirri, C. F.
Tresso, E.
Meier, J.
Dubail, S.
Shah, A.
Date Issued

1994

Published in
MRS Symp.
Volume

336

Start page

481

End page

486

Note

IMT-NE Number: 169

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
PV-LAB  
Available on Infoscience
February 10, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/34870
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