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research article

Special Section on the Interface of Holography and MEMS

Blanche, Pierre-Alexandre
•
Banerjee, Partha
•
Moser, Christophe  
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2015
Journal of Micro/Nanolithography, MEMS, and MOEMS
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Type
research article
DOI
10.1117/1.JMM.14.4.041301
Web of Science ID

WOS:000366902300002

Author(s)
Blanche, Pierre-Alexandre
•
Banerjee, Partha
•
Moser, Christophe  
•
Kim, Myung K.
Date Issued

2015

Publisher

Spie-Soc Photo-Optical Instrumentation Engineers

Published in
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume

14

Issue

4

Article Number

041301

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LAPD  
Available on Infoscience
February 16, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/124194
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