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research article
Spatially Controlled Membrane Depositions for Silicon-Based Sensors
1993
Type
research article
Author(s)
Date Issued
1993
Published in
Volume
47
Issue
6
Start page
241
End page
244
Note
92
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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