research article
Spatially Controlled Membrane Depositions for Silicon-Based Sensors
1993
Type
research article
Author(s)
Date Issued
1993
Published in
Volume
47
Issue
6
Start page
241
End page
244
Note
92
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record