conference paper
One mask nickel micro-fabricated reed relay
2000
MEMS '00 13th Annual International Conference on Micro Electro Mechanical Systems
Type
conference paper
Author(s)
Date Issued
2000
Published in
MEMS '00 13th Annual International Conference on Micro Electro Mechanical Systems
Start page
176
End page
179
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record