Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Wafer-Scale Demonstration of a Highly Sensitive Strain Sensor Based on Polycrystalline VO<inf>2</inf>
 
Loading...
Thumbnail Image
conference paper

Wafer-Scale Demonstration of a Highly Sensitive Strain Sensor Based on Polycrystalline VO2

Saadat Somaehsofla, Zahra  
•
Masserey, Cyrille  
•
Varini, Anna  
Show more
2025
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
38th International Conference on Micro Electro Mechanical Systems

Vanadium dioxide (VO2) exhibits structural phase transition that can be triggered by thermal, electrical, and mechanical stimuli, making it a highly interesting material for MEMS/NEMS based sensors and actuators thanks to responsivity and exceptional sensitivity. For the first time, we report highly sensitive 2-terminal polycrystalline thin-film (100nm) VO2 strain sensor with 534-gauge factor, based on wafer-scale optimized Pulse Laser Deposition (PLD). Improvement in polycrystalline VO2 microstructure was fundamental to achieve this sensitive strain sensor. The proposed CMOS-compatible fabrication method of such strain sensors is scalable and expected to advance the development of new integrated strain sensors exploiting phase change materials.

  • Details
  • Metrics
Type
conference paper
DOI
10.1109/MEMS61431.2025.10917570
Scopus ID

2-s2.0-105001661505

Author(s)
Saadat Somaehsofla, Zahra  
•
Masserey, Cyrille  
•
Varini, Anna  
•
Flandre, Denis
•
Ionescu, Mihai Adrian  
Date Issued

2025

Publisher

Institute of Electrical and Electronics Engineers Inc.

Published in
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI of the book
10.1109/MEMS61431.2025
ISBN of the book

9798331508890

Start page

635

End page

638

Subjects

Phase Change Material

•

Pulse Laser Deposition

•

Strain Sensitivity

•

Strain Sensor

•

Vanadium Dioxide

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent acronymEvent placeEvent date
38th International Conference on Micro Electro Mechanical Systems

MEMS 2025

Kaohsiung, Taiwan, Province of China

2025-01-19 - 2025-01-23

FunderFunding(s)Grant NumberGrant URL

Swiss National Science Foundation

206231

Available on Infoscience
April 10, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/249016
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés