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conference paper
Microstructuring of Silicon by Electro-Discharge Machining (EDM) - part II: Applications
1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
Type
conference paper
Authors
Heeren, P. H.
•
Beuret, C.
•
Larsson, O.
•
Bertholds, A.
•
Reynaerts, D.
Publication date
1996
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page
255
End page
258
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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