conference paper
Microstructuring of Silicon by Electro-Discharge Machining (EDM) - part II: Applications
1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
Type
conference paper
Author(s)
Heeren, P. H.
Beuret, C.
Larsson, O.
Bertholds, A.
Reynaerts, D.
Date Issued
1996
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page
255
End page
258
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record