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research article
All-photoplastic, soft cantilever cassette probe for scanning force microscopy
The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.
Type
research article
Author(s)
Date Issued
2000
Published in
Volume
B18
Issue
2
Start page
617
End page
620
Note
237
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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