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  4. All-photoplastic, soft cantilever cassette probe for scanning force microscopy
 
research article

All-photoplastic, soft cantilever cassette probe for scanning force microscopy

Genolet, G.
•
Despont, M.
•
Vettiger, P.
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2000
Journal of Vacuum Science Technology

The fabrication and application of photoplastic scanning force microscopy (SFM) probes has been demonstrated. Simple molding and replication techniques, inexpensive photoplastic material, reusable molds and several layers per probe make it a very attractive for fabricating low-cost photoplastic SFM probes. The good homogeneity of the cantilevers within a cassette and among cassettes over a 4 in. wafer coupled with an appropriate holder provides ease of operation.

  • Details
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Type
research article
DOI
10.1116/1.591248
Author(s)
Genolet, G.
•
Despont, M.
•
Vettiger, P.
•
Anselmetti, D.
•
de Rooij, N. F.  
Date Issued

2000

Published in
Journal of Vacuum Science Technology
Volume

B18

Issue

2

Start page

617

End page

620

Note

237

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39297
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