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  4. Momentum-Space Imaging of Ultra-Thin Electron Liquids in δ-Doped Silicon
 
research article

Momentum-Space Imaging of Ultra-Thin Electron Liquids in δ-Doped Silicon

Constantinou, Procopios
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Stock, Taylor J. Z.
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Crane, Eleanor
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July 19, 2023
Advanced Science

Two-dimensional dopant layers (δ-layers) in semiconductors provide the high-mobility electron liquids (2DELs) needed for nanoscale quantum-electronic devices. Key parameters such as carrier densities, effective masses, and confinement thicknesses for 2DELs have traditionally been extracted from quantum magnetotransport. In principle, the parameters are immediately readable from the one-electron spectral function that can be measured by angle-resolved photoemission spectroscopy (ARPES). Here, buried 2DEL δ-layers in silicon are measured with soft X-ray (SX) ARPES to obtain detailed information about their filled conduction bands and extract device-relevant properties. This study takes advantage of the larger probing depth and photon energy range of SX-ARPES relative to vacuum ultraviolet (VUV) ARPES to accurately measure the δ-layer electronic confinement. The measurements are made on ambient-exposed samples and yield extremely thin (< 1 nm) and dense (≈1014 cm−2) 2DELs. Critically, this method is used to show that δ-layers of arsenic exhibit better electronic confinement than δ-layers of phosphorus fabricated under identical conditions.

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Type
research article
DOI
10.1002/advs.202302101
Web of Science ID

WOS:001031896400001

Author(s)
Constantinou, Procopios
Stock, Taylor J. Z.
Crane, Eleanor
Kolker, Alexander
van Loon, Marcel
Li, Juerong
Fearn, Sarah
Bornemann, Henric
D'Anna, Nicolo
Fisher, Andrew J. J.
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Date Issued

2023-07-19

Publisher

WILEY

Published in
Advanced Science
Subjects

Chemistry, Multidisciplinary

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Nanoscience & Nanotechnology

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Materials Science, Multidisciplinary

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Chemistry

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Science & Technology - Other Topics

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Materials Science

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2deg

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arpes

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arsenic in silicon

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delta layer

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silicon

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soft x-ray angle-resolved photoelectron spectroscopy (soft x-ray arpes)

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surface-states

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doping layer

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photoemission

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
IPHYS  
Available on Infoscience
August 14, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/199845
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