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research article

Optical, structural, and morphological characterisation of epitaxial ZnO films grown by pulsed-laser deposition

Mosca, M.
•
Macaluso, R.
•
Cali, C.
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2013
Thin Solid Films

We report on ZnO epitaxial growth by pulsed-laser deposition (PLD) on different substrates, such as quartz, sapphire, and GaN template. Approximately 1 mu m-thick films were grown under different substrate temperatures and background oxygen conditions. X-ray diffraction analysis indicated preferential growth along the c-axis direction with a full-width at half maximum(FWHM) of the rocking curve as narrow as 230 arcs in the case of the GaN template. Low-temperature photoluminescence showed A-excitonic emission near 3.36 eV and a FWHM of (DXA)-X-0 emission as small as 2.89 meV at 9 K. Atomic force microscope measurements showed that roughness as low as 18 nm could be obtained. These results prove that PLD is a low-cost technique suitable to grow heteroepitaxial ZnO layers with excellent properties in terms of luminescence, crystallinity and morphology. (C) 2013 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.tsf.2013.04.146
Web of Science ID

WOS:000321111100009

Author(s)
Mosca, M.
Macaluso, R.
Cali, C.
Butte, R.  
Nicolay, S.
Feltin, E.
Martin, D.
Grandjean, N.  
Date Issued

2013

Publisher

Elsevier Science Sa

Published in
Thin Solid Films
Volume

539

Start page

55

End page

59

Subjects

Pulsed laser deposition

•

Zinc oxide

•

Photoluminescence

•

Structural properties

•

Surface roughness

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95721
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