conference poster
E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection
2003
4th Spanish Conference on Electron Devices (CDE)
Type
conference poster
Author(s)
Date Issued
2003
Published in
4th Spanish Conference on Electron Devices (CDE)
Start page
495
End page
498
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Calella | 2003 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record