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  4. UV metal semiconductor metal detectors - A robust choice for (Al, Ga)N based detectors
 
conference paper

UV metal semiconductor metal detectors - A robust choice for (Al, Ga)N based detectors

Mosca, M.
•
Grandjean, N.  
•
Omnes, F.
Show more
2004
Uv Solid-State Light Emitters And Detectors
NATO Advanced Research Workshop on UV Solid-State Light Emitters and Detectors

UV detection is interesting for combustion optimization, air contamination control, fire and solar blind rocket launching detection. Most of these applications require that UV detectors have a huge dynamic response between UV and the visible, and a very low dark current in the range of the UV flux measured. (Al,Ga)N alloys present a large direct bandgap in this range and therefore can be used as an active region in such detectors. To take advantage of the large Schottky barrier, the good alloy quality, and to avoid any doping problems, we have developed MSM photodetectors. High quality material has been grown with MOCVD and MBE on sapphire substrates. Stress management is employed for aluminum contents up to 65% to reduce crack density. This is correlated with non-ideal features like dark current, sub-bandgap response and non-linearity between photocurrent and optical flux. The spectral selectivity between UV and visible reaches five orders of magnitude. A geometry of inter-digitized fingers is optimized in regards to the peak response. The Schottky barrier and a dielectric passivation result in dark currents lower than 1 fA up to 30 V for a 100 x 100 mum(2) pixel. Consequently, detectivity is mainly limited by shot noise and corresponds to a noise of 500 photons per second and per pixel.

  • Details
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Type
conference paper
DOI
10.1007/978-1-4020-2103-9_6
Author(s)
Mosca, M.
Grandjean, N.  
Omnes, F.
Semond, F.
Duboz, J. Y.
Hirsch, L.
Reverchon, J. L.
Date Issued

2004

Publisher

Springer

Published in
Uv Solid-State Light Emitters And Detectors
Series title/Series vol.

Nato Science Series, Series Ii: Mathematics, Physics And Chemistry; 144

Start page

77

End page

92

Subjects

UV solar blind detectors

•

metal-semiconductor-metal detectors

•

stress management in (AI,Ga)N

•

Ibicc

•

Molecular-Beam Epitaxy

•

Solar-Blind Photodetectors

•

Vapor-Phase Epitaxy

•

Ultraviolet Detectors

•

Algan

•

Gan

•

Photodiodes

•

Mechanisms

•

Recombination

•

Efficiency

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Event nameEvent placeEvent date
NATO Advanced Research Workshop on UV Solid-State Light Emitters and Detectors

Vilnius, LITHUANIA

Jun 17-21, 2003

Available on Infoscience
October 13, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55482
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