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  4. Fabrication process for a microfluidic valve
 
conference paper

Fabrication process for a microfluidic valve

Luque, A.
•
Quero, J.M.
•
Hibert, C.  
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2003
Proceedings of the 2003 International Symposium on Circuits and Systems (ISCAS 2003)

In this paper, the necessity for a high pressure valve is discussed, and a design for such a valve that has been previously presented is described. This valve can be built using simple fabrication techniques available in microsystem foundries. Its fabrication process is also shown. Finally, a brief description of the expected behaviour of the valve is presented.

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2003_ISCAS_Valve.mdi

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