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  4. Elastic strain engineering for ultralow mechanical dissipation
 
conference paper

Elastic strain engineering for ultralow mechanical dissipation

Engelsen, Nils J.  
•
Ghadimi, Amir H.  
•
Fedorov, Sergey A.  
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January 1, 2018
2018 International Conference On Optical Mems And Nanophotonics (Omn)
International Conference on Optical MEMS and Nanophotonics (OMN)

Extreme stresses can be produced in nanoscale structures, a feature which has been used to realize enhanced materials properties, such as the high mobility of silicon in modern transistors. Here we show how nanoscale stress can be used to realize exceptionally low mechanical dissipation, when combined with "soft-clamping" - a form of phononic engineering. Specifically, using a non-uniform phononic crystal pattern, we colocalize the strain and flexural motion of a freestanding Si3N4 nanobeam. Ringdown measurements at room temperature reveal string-like modes with quality (Q) factors as high as 800 million and Q x frequency exceeding 10(15) Hz.

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Type
conference paper
DOI
10.1109/OMN.2018.8454645
Web of Science ID

WOS:000454732000069

Author(s)
Engelsen, Nils J.  
Ghadimi, Amir H.  
Fedorov, Sergey A.  
Kippenberg, Tobias J.  
Bereyhi, Mohammad J.
Schilling, Ryan D.  
Wilson, Dalziel J.  
Date Issued

2018-01-01

Publisher

IEEE

Publisher place

New York

Published in
2018 International Conference On Optical Mems And Nanophotonics (Omn)
ISBN of the book

978-1-5090-6374-1

Series title/Series vol.

International Conference on Optical MEMS and Nanophotonics

Start page

143

End page

144

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Optics

•

Engineering

•

Science & Technology - Other Topics

•

Optics

•

nanomechanics

•

optomechanics

•

strain engineering

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Event nameEvent placeEvent date
International Conference on Optical MEMS and Nanophotonics (OMN)

Lausanne, SWITZERLAND

Jul 29-Aug 02, 2018

Available on Infoscience
January 23, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/153780
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