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research article

Ultrasonic micromotors based on PZT thin films

Muralt, P.  
1999
Journal of Electroceramics

The integration of piezoelectric Pb(Zr,Ti)O-3 thin films on silicon substrates for ultrasonic motor applications is reviewed. With suitable buffer and bottom electrode layers the problems due to high processing temperatures in oxygen ambient can be handled. Reproducibility can be increased by stabilized electrode systems and seeding layers for PZT nucleation. Elastic fin micromotors of millimeter size have been fabricated. They achieve the necessary torques, low speeds, and battery voltage operation for applications in wristwatches. However, their efficiency needs to be improved. Better figure of merits of the material still can be achieved. Better designs with larger coupling factors are desirable.

  • Details
  • Metrics
Type
research article
DOI
10.1023/A:1009943110147
Web of Science ID

WOS:000081264400005

Author(s)
Muralt, P.  
Date Issued

1999

Published in
Journal of Electroceramics
Volume

3

Issue

2

Start page

143

End page

150

Subjects

ultrasonic actuator

•

thin films

•

pzt

•

integration

•

gel

•

electrodes

•

orientation

•

membranes

•

layers

Note

Muralt, P Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland

213GM

Cited References Count:29

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233391
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