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  4. Printing meets lithography: soft approaches to high resolution patterning
 
research article

Printing meets lithography: soft approaches to high resolution patterning

Michel, P.
•
Bernard, A.
•
Bietsch, A.
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2001
IBM Journal of Research and Development
  • Details
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Type
research article
DOI
10.1147/rd.455.0697
Author(s)
Michel, P.
Bernard, A.
Bietsch, A.
Delamarche, E.
Geissler, M.
Juncker, D.
Kind, H.
Renault, J.-P.
Rothuizen, H.
Schmid, H.
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Date Issued

2001

Published in
IBM Journal of Research and Development
Volume

45

Start page

697

End page

719

Note

267

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39603
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