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  4. Monolithic silicon nitride electro-optic modulator enabled by optically-assisted poling
 
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Monolithic silicon nitride electro-optic modulator enabled by optically-assisted poling

Lafforgue, Christian  
•
Zabelich, Boris  
•
Bres, Camille-Sophie  
April 8, 2025
Communications Physics

Electro-optic (EO) modulation is a key functionality to have on-chip. However, achieving a notable linear EO effect in stoichiometric silicon nitride has been a persistent challenge due to the material's intrinsic properties. Recent advancements revealed that the displacement of thermally excited charge carriers under a high electric field induces a second-order nonlinearity in silicon nitride, thus enabling the linear EO effect in this platform regardless of the material's inversion symmetry. In this work, we introduce optically-assisted poling of a silicon nitride microring resonator, removing the need for high-temperature processing of the device. The optical stimulation of charges avoids the technical constraints due to elevated temperature. By optimizing the poling process, we experimentally obtain a long-term effective second-order nonlinearity ${\chi}_{\text{eff}}^{(2)}$ of 1.218 pm/V. Additionally, we measure the high-speed EO response of the modulator, showing a bandwidth of 4 GHz, only limited by the quality factor of the microring resonator. This work goes towards the implementation of monolithic, compact silicon nitride EO modulators, a necessary component for high-density integrated optical signal processing.

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Name

10.1038_s42005-025-02071-8.pdf

Type

Main Document

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openaccess

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CC BY-NC-ND

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1.09 MB

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Adobe PDF

Checksum (MD5)

61c8fa8b76d89d5e72514cba39d412e1

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