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  4. Simulation and characterization of piezoelectric micromachined ultrasonic transducers (PMUT's) based on PZT/SOI membranes
 
research article

Simulation and characterization of piezoelectric micromachined ultrasonic transducers (PMUT's) based on PZT/SOI membranes

Baborowski, J.  
•
Ledermann, N.  
•
Muralt, P.  
Show more
2003
Integrated Ferroelectrics

Piezoelectric micromachined ultrasonic transducers for airborne and immersed applications working in the frequency range from 20 kHz in liquid to 750 kHz in air have been fabricated and characterized, as well as simulated by finite element modelling. The basic element consisted of a oxidized and platinized silicon membrane coated with a 2 mum thick (100)-textured Pb(Zr,Ti)O-3 (PZT) thin film deposited by sol-gel techniques. SOI wafers have been applied to obtain a good definition of the silicon part of the membrane. The unclamping of the silicon membrane at the border increases drastically the coupling factor. For unclamped structures the membranes completely covered with top electrode show the highest coupling coefficient (k(2) = 5.6%). Immersed (in Fluorinert(TM)) membranes show 7 times smaller quality factor, while the coupling factor k(2) remains the same. The obtained structures were enough sensitive to detect acoustic waves in air and in liquid emitted from the same type of elements at a distance of 20 and 2 cm, respectively. Good agreement between the experimental results (membrane deflection, admittance in air and in liquid) and FEA simulations has been obtained.

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Type
research article
DOI
10.1080/10584580390258930
Web of Science ID

WOS:000187625200006

Author(s)
Baborowski, J.  
Ledermann, N.  
Muralt, P.  
Schmitt, D.
Date Issued

2003

Published in
Integrated Ferroelectrics
Volume

54

Issue

1

Start page

557

End page

564

Subjects

pmuts

•

pzt

•

fea simulations

Note

Baborowski, J Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Fraunhofer IBMT, D-66386 St Ingbert, Germany

758GG

Cited References Count:5

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233499
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