Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Vanadium-Doped Hafnium Oxide: A High-Endurance Ferroelectric Thin Film with Demonstrated Negative Capacitance
 
Loading...
Thumbnail Image
research article

Vanadium-Doped Hafnium Oxide: A High-Endurance Ferroelectric Thin Film with Demonstrated Negative Capacitance

Ansari, Ehsan  
•
Martinolli, Niccolo  
•
Hartmann, Emeric  
Show more
February 7, 2025
Nano Letters

This study proposes and validates a novel CMOS-compatible ferroelectric thin-film insulator made of vanadium-doped hafnium oxide (V:HfO2) by using an optimized atomic layer deposition (ALD) process. Comparative electrical performance analysis of metal-ferroelectric-metal capacitors with varying V-doping concentrations, along with advanced material characterizations, confirmed the ferroelectric behavior and reliability of V:HfO2. With remnant polarization (P-r) values up to 20 mu C/cm(2), a coercive field (E-c) of 1.5 MV/cm, excellent endurance (>10(11) cycles without failure, extrapolated to 10(12) cycles), projected 10-year nonvolatile retention (>100 days measured), and large grain sizes of similar to 180 nm, V:HfO2 emerges as a promising robust candidate for nonvolatile memory and neuromorphic applications. Importantly, negative capacitance (NC) effects were observed and analyzed in V:HfO2 through pulsed measurements, demonstrating its potential for NC applications. Finally, this novel ferroelectric shows potential as a gating insulator for future 3-terminal vanadium dioxide Mott-insulator devices and sensors, achieved through an all-ALD process.

  • Details
  • Metrics
Type
research article
DOI
10.1021/acs.nanolett.4c05671
Web of Science ID

WOS:001417161600001

PubMed ID

39918289

Author(s)
Ansari, Ehsan  
•
Martinolli, Niccolo  
•
Hartmann, Emeric  
•
Varini, Anna  
•
Stolichnov, Igor  
•
Ionescu, Adrian Mihai  
Date Issued

2025-02-07

Publisher

AMER CHEMICAL SOC

Published in
Nano Letters
Subjects

vanadium-doped hafnium oxide (V:HfO2)

•

ferroelectricthin film

•

high endurance

•

CMOS-compatible

•

atomic layer deposition (ALD)

•

negative capacitance

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
FunderFunding(s)Grant NumberGrant URL

Schweizerischer Nationalfonds zur Frderung der Wissenschaftlichen Forschung

208233

Swiss National Science Foundation (SNSF)

Available on Infoscience
February 18, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/247046
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés