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conference paper

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

Noell, W.
•
Sun, W.
•
de Rooij, N. F. 
more
2002
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Type
conference paper
DOI
10.1109/LEOS.2002.1159440
Authors
Noell, W.
•
Sun, W.
•
de Rooij, N. F. 
•
Herzig, H. P. 
•
Manzardo, O.
•
Dändliker, R. 
Publication date

2002

Published in
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Volume

2

Start page

580

End page

581

Written at

OTHER

EPFL units
OPT 
SAMLAB 
Available on Infoscience
April 22, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/37852