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Noell, W.
•
Sun, W.
•
de Rooij, N. F.  
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2002
LEOS 2002 IEEE Annual Meeting Conference Proceedings

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

conference paper
Type
conference paper
DOI
10.1109/LEOS.2002.1159440
Author(s)
Noell, W.
•
Sun, W.
•
de Rooij, N. F.  
•
Herzig, H. P.  
•
Manzardo, O.
•
Dändliker, R.  
Date Issued

2002

Journal
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Volume

2

Start page

580

End page

581

Written at

OTHER

EPFL units
OPT  
SAMLAB  
Available on Infoscience
April 22, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/37852