Loading...
research article
Microsystems Research and Development at IMT Neuchatel - Optical Microshutters and Torsional Micromirrors
Jaecklin, V. P.
•
Linder, C.
Type
research article
Authors
Jaecklin, V. P.
•
Linder, C.
Publication date
1993
Published in
Volume
6
Issue
1
Start page
106
Note
97
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record