An original study of the dielectric charging in a suspended gate FET device (SG-FET) and its use for memory applications is reported. Combining a movable conductive gate with the ability to retain charge on top of the dielectric layer of FET device, a MEMS memory device has been produced where the advantages that positive and negative pull-in voltages can be used to charge and discharge the dielectric and the capacitance's ratio can be used to retain the charge in the dielectric layer with low charge value but with high retention.
Type
conference paper
Authors
Publication date
2008
Published in
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Start page
685
End page
688
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
July 15, 2009
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