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conference paper
Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers
2007
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Type
conference paper
Author(s)
Date Issued
2007
Published in
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
ISBN of the book
978-1-4244-0841-2
Volume
Poster
Start page
U544
End page
U545
Note
Llobera, A. Villanueva, G. Cadarso, V. J. Seidemann, V. Buettgenbach, S. Plaza, J. A., 14th International Conference on Solid-State Sensors, Actuators and Microsystems, JUN 10-14, 2007, Lyon, FRANCE
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Lyon, France | 2007 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record