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conference paper
High-Q Copper / Polyimide Inductors: Fabrication Results and Electrical Performance Analysis
2004
Proceedings of the 5th Workshop on MEMS for Millimeter-Wave Communications (MEMSWAVE'04)
Type
conference paper
Authors
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Pavius, M.
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Dehollain, C.
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Publication date
2004
Published in
Proceedings of the 5th Workshop on MEMS for Millimeter-Wave Communications (MEMSWAVE'04)
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
October 10, 2007
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