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research article

Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor

Kuoni, A.
•
Holzherr, R.
•
Boillat, M.
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2003
Journal of Micromechanics and Microengineering

Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabrication of the test devices. The pressure sensor membrane is a thin polyimide sheet bonded to a silicon wafer and the sensing material is sputtered ZnO piezoelectric thin film. The fabricated liquid flow sensor has been tested with a piezoelectric micropump for flow rates from 30 μl h-1 to 300 μl h-1 . Stroke volumes of 1 to 10 nl have been measured. The strain in the sensing layer has been modeled and a transverse piezoelectric coefficient of e31,f= -0.294 C m-2 has been extracted.

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Type
research article
DOI
10.1088/0960-1317/13/4/317
Author(s)
Kuoni, A.
•
Holzherr, R.
•
Boillat, M.
•
de Rooij, N. F.  
Date Issued

2003

Published in
Journal of Micromechanics and Microengineering
Volume

13

Issue

4

Start page

S103

End page

S107

Note

297

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39512
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