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conference paper
Fabrication of Nano Interdigitated Electrodes
2003
Smart Sensors, Actuators, and MEMS
Type
conference paper
Authors
Berdondini, L.
•
Kalbac, M.
•
•
Gullo, M.
•
Staufer, U.
•
Koudelka-Hep, M.
•
Publication date
2003
Published in
Smart Sensors, Actuators, and MEMS
Series title/Series vol.
SPIE Proceedings; 5116
Start page
402
End page
405
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place |
Maspalomas, Gran Canaria, Canary Islands, Spain | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record