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conference poster not in proceedings

Dry etching release of polymer-based cantilevers with integrated electrodes

Mouaziz, S  
•
Imboden, C
•
Boero, G  
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2006
International workshop on nanomechanical sensors

We report here a new method to release functional SU-8 micro-cantilevers with embedded metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.

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Mouaziz_2006_IWNS.pdf

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