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  4. Direct high-temperature growth of single-crystalline GaN on ScAlMgO4 substrates by metalorganic chemical vapor deposition
 
research article

Direct high-temperature growth of single-crystalline GaN on ScAlMgO4 substrates by metalorganic chemical vapor deposition

Floriduz, Alessandro  
•
Matioli, Elison  
April 1, 2022
Japanese Journal Of Applied Physics

In this note, we demonstrate direct high-temperature growth of single-crystalline GaN on c-plane ScAlMgO4 substrates by metalorganic chemical vapor deposition, without using low-temperature buffers. We found that a trimethylaluminium preflow was crucial to suppress island growth and to achieve uniform mirror-like Ga-polar GaN layers. The preflow time was found to have a direct impact on the crystalline quality of GaN. We also show that thin GaN layers directly grown at high temperature can be used as buffers for the growth of lattice-matched In0.17Ga0.83N layers on ScAlMgO4. The presented results demonstrate the potential of direct growth of GaN on ScAlMgO4.

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Type
research article
DOI
10.35848/1347-4065/ac54fe
Web of Science ID

WOS:000780034500001

Author(s)
Floriduz, Alessandro  
Matioli, Elison  
Date Issued

2022-04-01

Publisher

IOP Publishing Ltd

Published in
Japanese Journal Of Applied Physics
Volume

61

Issue

4

Article Number

048002

Subjects

Physics, Applied

•

Physics

•

gan

•

scalmgo4

•

mocvd

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
Available on Infoscience
April 25, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/187241
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