Monolithic actuators have turned out to be an efficient solution to several design and assembly problems associated with inertial drive positioning systems. In addition to their compact size with a possible thickness below 1.5 mm, the modular actuators presented in this paper can be manufactured cost efficiently even for small batches. This paper explains the basic operation of the actuators and their fabrication technology based on thick-film technology with assembly on either Al2O3 substrates or PCB. Some applications of single- and multi actuator modules are given.