KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

Normand, P.

Dumas, C.

•

Ressier, L.

•

Grisolia, J.

2008

Materials and emerging technologies for non-volatile-memory devices

European Materials Research Society (EMRS 2008): Symposium H: Materials and emerging technologies for non-volatile-memory devices

KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography

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