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conference poster
DRIE and FIB combination for nanotip fabrication
2004
30th International Conference on Micro- and Nano- Engineering (MNE)
Type
conference poster
Authors
•
Plaza, J. A.
•
Sanchez-Amores, A.
•
Bausells, J.
•
Martinez, E.
•
Samitier, J.
•
Errachid, A.
Publication date
2004
Published in
30th International Conference on Micro- and Nano- Engineering (MNE)
Start page
443
End page
446
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
Rotterdam | 2004 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record