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  4. MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials
 
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conference presentation

MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials

Janphuang, P.  
•
Isarakorn, D.  
•
Briand, D.  
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2011
2nd International Workshop on Piezoelectric MEMS
  • Details
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Type
conference presentation
Author(s)
Janphuang, P.  
•
Isarakorn, D.  
•
Briand, D.  
•
Gariglio, S.
•
Ambri, A.
•
Triscone, J.-M.
•
Guy, F.
•
Reiner, J. W.
•
Ahn, C. H.
•
de Rooij, N.  
Date Issued

2011

Subjects

MEMS

•

Epitaxial Piezoelectric Materials

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
2nd International Workshop on Piezoelectric MEMS

Lausanne, Switzerland

September 6-7,2011

Available on Infoscience
September 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/70965
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