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research article

First fully integrated 2-D array of single-photon detectors in standard CMOS technology

Rochas, A.
•
Gosch, M.
•
Serov, A.  
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2003
Ieee Photonics Technology Letters

A two-dimensional (2-D) array (4 by 8) of single-photon avalanche diodes integrated in an industrial complementary metal-oxide-semiconductor (CMOS) process is presented. Each pixel combines a photodiode biased above its breakdown voltage in the so-called Geiger mode, a quenching resistor, and a simple comparator. The pitch between the pixels is 75 mum and the diameter of each pixel is 6.4 mum. The full integration allows reducing the number of charge carriers in a Geiger pulse. The electroluminescence responsible for optical crosstalks between pixels is then reduced leading to a negligible optical crosstalk probability. Thanks to the cleanness of the fabrication process, no afterpulsing effects are noticed. At room temperature, most of the pixels exhibit a dark-count rate of about. 50 Hz. The detection probability is almost identical for all 32 pixels of the array with relative variation in the range of a-few. percents. This letter demonstrates the feasibility of an array: of single-photon detectors sensitive in the visible part of the spectrum. Besides low production costs and compactness,, an undeniable benefit lies in the potential to easily modify the design to fit a specific application. Furthermore, the CMOS integration opens the way p to on-chip data processing.

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Type
research article
DOI
10.1109/LPT.2003.813387
Author(s)
Rochas, A.
•
Gosch, M.
•
Serov, A.  
•
Besse, P. A.  
•
Popovic, R. S.
•
Lasser, T.  
•
Rigler, R.  
Date Issued

2003

Published in
Ieee Photonics Technology Letters
Volume

15

Issue

7

Start page

963

End page

965

Subjects

Geiger mode

•

optical crosstalks

•

silicon complementary

•

metal-oxide-semiconductor (CMOS) technology

•

single-photon avalanche

•

diode (SPAD)

•

FLUORESCENCE

•

MOLECULES

Note

Swiss Fed Inst Technol, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland. Swiss Fed Inst Technol, Inst Imaging & Appl Opt, CH-1015 Lausanne, Switzerland. Gnothis SA, CH-1015 Lausanne, Switzerland. Karolinska Inst, S-17177 Stockholm, Sweden. Rochas, A, Swiss Fed Inst Technol, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland.

ISI Document Delivery No.: 693NU

Cited Reference Count: 7

URL

URL

http://ieeexplore.ieee.org/xpls/abs_all.jsp?isNumber=27156&prod=JNL&arnumber=1206776&arSt=+963&ared=+965&arAuthor=Rochas%2C+A.%3B+Gosch%2C+M.%3B+Serov%2C+A.%3B+Besse%2C+P.A.%3B+Popovic%2C+R.S.%3B+Lasser%2C+T.%3B+Rigler%2C+R.&arNumber=1206776&a_id0=1206767&a_id1=1206768&a_id2=1206769&a_id3=1206770&a_id4=1206771&a_id5=1206772&a_id6=1206773&a_id7=1206774&a_id8=1206775&a_id9=1206776&a_id10=1206777&a_id11=1206778&a_id12=1206779&a_id13=1206780&a_id14=1206781&count=15
Peer reviewed

REVIEWED

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October 3, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/234916
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