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research article

Fabrication of metallic probes by a new technology based on double molding

Beuret, C.
•
Staufer, U.
•
de Rooij, N. F.  
1998
Microelectronic Engineering
  • Details
  • Metrics
Type
research article
DOI
10.1016/S0167-9317(98)00127-0
Author(s)
Beuret, C.
•
Staufer, U.
•
de Rooij, N. F.  
Date Issued

1998

Published in
Microelectronic Engineering
Volume

41/42

Start page

543

End page

546

Note

185

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39038
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