Optical testing of fine gratings structures

conference paper

Blattner, P.

•

1996

Optical Inspection and Micromeasurements

Type

conference paper

DOI

Authors

Blattner, P.

•

Publication date

1996

Publisher

SPIE-The International Society for Optical Engineering, Bellingham, USA

Published in

Optical Inspection and Micromeasurements

Series title/Series vol.

Proc. SPIE; 2782

Start page

628

End page

634

Written at

OTHER

EPFL units

Available on Infoscience

April 22, 2009

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