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2003
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Fabrication of an active nanostencil with intergrated microshutters
conference paper
not available
Type
conference paper
Author(s)
Date Issued
2003
Journal
Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03)
Volume
2
Start page
1651
End page
1654
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Boston, USA | 8-12 June, 2003 | |
Available on Infoscience
April 13, 2007
Use this identifier to reference this record