research article

Stretchable wavy metal interconnects

Jones, J.
•
Lacour, S. P.  
•
Wagner, S.
Show more
2004
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Type
research article
DOI
10.1116/1.1756879
Author(s)
Jones, J.
Lacour, S. P.  
Wagner, S.
Suo, Z.
Date Issued

2004

Publisher

AVS

Published in
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume

22

Issue

4

Start page

1723

End page

1725

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LSBI  
Available on Infoscience
May 1, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/79829