Loading...
Thumbnail Image
research article

Stretchable wavy metal interconnects

Jones, J.
•
Lacour, S. P. 
•
Wagner, S.
more
2004
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Type
research article
DOI
10.1116/1.1756879
Authors
Jones, J.
•
Lacour, S. P. 
•
Wagner, S.
•
Suo, Z.
Publication date

2004

Publisher

AVS

Published in
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume

22

Issue

4

Start page

1723

End page

1725

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LSBI 
Available on Infoscience
May 1, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/79829