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  4. Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems
 
research article

Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems

Yamahata, Christophe  
•
Stranczl, Marc  
•
Sarajlic, Edin
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2012
Journal of Microelectromechanical Systems

A simple optical method is proposed for performing in-plane experimental modal analysis of micromachined structures with a conventional charge-coupled device (CCD) camera. The motion of a micromechanical device actuated by high frequency sinusoidal forces (kHz range) is recorded at the fixed sampling rate of a camera (typically 28 frames/sec.) which is configured with a short shutter aperture time (1/5000 s). Provided a CCD sensor with sufficient sensitivity, lots of information are contained in the video on the dynamics of the vibrating system despite the limited frame rate. Taking advantage of the theory of undersampling, we show that the dynamics of systems with several kHz bandwidth can be retrieved very easily. For demonstration purposes, we first study a push-pull electrostatic comb- drive actuator, which is a well-known damped harmonic oscillator system. Then, we show that our measurement method also provides useful information on the behavior of nonlinear systems. In particular, we can characterize systems' superharmonic and subharmonic resonances in a straightforward way.

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Type
research article
DOI
10.1109/JMEMS.2012.2191265
Web of Science ID

WOS:000307124200023

Author(s)
Yamahata, Christophe  
Stranczl, Marc  
Sarajlic, Edin
Krijnen, Gijs J. M.
Gijs, Martinus  
Date Issued

2012

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

21

Issue

4

Start page

934

End page

944

Subjects

Folding frequency

•

image analysis

•

in-plane vibration

•

microelectromechanical systems (MEMS) characterization

•

modal analysis

•

Nyquist criterion

•

optical measurement

•

resonant frequency

•

subharmonic

•

superharmonic

•

undersampling

•

video microscopy

URL

URL

http://lmis2.epfl.ch/nanoplus/
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/78677
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