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conference paper
Large micromirror array designed and tested for Multi-Object Spectroscopy
2012
International Conference On Optical Mems And Nanophotonics (OMN)
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
Type
conference paper
Web of Science ID
WOS:000309942400054
Authors
Publication date
2012
Publisher
Published in
International Conference On Optical Mems And Nanophotonics (OMN)
ISBN of the book
978-1-4577-1513-6
Publisher place
New York
Total of pages
2
Volume
1
Start page
115
End page
116
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
Banff, Canada | August 6-9, 2012 | |
Available on Infoscience
February 27, 2013
Use this identifier to reference this record