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research article

Low-Loss Integrated Nanophotonic Circuits with Layered Semiconductor Materials

He, Jijun  
•
Paradisanos, Ioannis
•
Liu, Tianyi  
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April 14, 2021
Nano Letters

Monolayer transition-metal dichalcogenides with direct bandgaps are emerging candidates for optoelectronic devices, such as photodetectors, light-emitting diodes, and electro-optic modulators. Here we report a low-loss integrated platform incorporating molybdenum ditelluride monolayers with silicon nitride photonic microresonators. We achieve microresonator quality factors >3 x 10(6) in the telecommunication O- to E-bands. This paves the way for low-loss, hybrid photonic integrated circuits with layered semiconductors, not requiring heterogeneous wafer bonding.

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