Loading...
ASEP : a CAD Program for Silicon Anisotropic Etching
research article
Type
research article
Author(s)
Date Issued
1991
Published in
Volume
28
Start page
71
End page
78
Note
52
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record