conference paper
Die Level Release of Silicon Photonic MEMS
2016
2016 International Conference On Optical Mems And Nanophotonics (OMN)
We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size.
Type
conference paper
Web of Science ID
WOS:000389586300021
Author(s)
Date Issued
2016
Publisher
Publisher place
New York
Published in
2016 International Conference On Optical Mems And Nanophotonics (OMN)
ISBN of the book
978-1-5090-1035-6
Total of pages
2
Series title/Series vol.
International Conference on Optical MEMS and Nanophotonics
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
January 24, 2017
Use this identifier to reference this record