conference paper
Vertically Buckled Bridges for Three-Dimensional SOI-MEMS
2003
2003 International Conference on Solid State Devices and Materials
Type
conference paper
Author(s)
Date Issued
2003
Published in
2003 International Conference on Solid State Devices and Materials
Start page
696
End page
697
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record