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  4. Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks
 
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conference paper

Low-temperature indium hermetic sealing of alkali vapor-cells for chip-scale atomic clocks

Straessle, R.
•
Pellaton, M.
•
Petremand, Y.  
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2012
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

We present a low-temperature indium hermetic bonding technique on wafer level without using flux, active atmosphere or other pretreatment of the indium. Its simplicity and low temperatures allow encapsulation of sensitive MEMS devices. Bonding stronger than 18 MPa was accomplished with temperatures never exceeding 140 degrees C. Leak rate measurements revealed leak rate below 2.5 x 10(-12) atm cc/s. This bonding technique is then applied to fabricate rubidium vapor-cells for chip-scale atomic clocks (CSAC). Saturated absorption spectroscopy performed two and five months after fabrication confirms less than 1 mbar of gas contamination, and the retrieved clock signal demonstrates the suitability of the cell for clock applications.

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Type
conference paper
DOI
10.1109/MEMSYS.2012.6170209
Web of Science ID

WOS:000312912800091

Author(s)
Straessle, R.
•
Pellaton, M.
•
Petremand, Y.  
•
Briand, D.  
•
Affolderbach, C.
•
Mileti, G.
•
de Rooij, N. F.  
Date Issued

2012

Publisher

IEEE

Publisher place

New York

Published in
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book

978-1-4673-0325-5

Total of pages

4

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Volume

1

Start page

361

End page

364

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

Paris, France

January 29-February 02, 2012

Available on Infoscience
June 18, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/81939
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