Loading...
conference paper
Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
2005
5th Round Table on Micro/Nano Technologies for Space
Type
conference paper
Author(s)
Date Issued
2005
Published in
5th Round Table on Micro/Nano Technologies for Space
Start page
134
End page
153
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record