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research article

InAIN/GaN HEMTs: A first insight into technological optimization

Kuzmik, J.
•
Kostopoulos, A.
•
Konstantinidis, G.
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2006
Ieee Transactions on Electron Devices

High-electron mobility transistors (HEMTs) were fabricated from heterostructures consisting of undoped In0.2Al0.8N barrier and GaN channel layers grown by metal-organic vapor phase epitaxy on (0001) sapphire substrates. The polarization-induced two-dimensional electron gas (2DEG) density and mobility at the In0.2Al0.8N/GaN heterojunction were 2 x 10(13) cm(-2) and 260 cm(2)V(-1)s(-1), respectively. A tradeoff was determined for the annealing temperature of Ti/Al/Ni/Au ohmic contacts in order to achieve a low contact resistance (pc = 2.4 X 10(-5) Omega(.)cm(2)) without degradation of the channels sheet resistance. Schottky barrier heights were 0.63 and 0.84 eV for Ni- and Pt-based contacts, respectively. The obtained dc parameters of 1-mu m gate-length HEMT were 0.64 A/mm drain current at V-GS = 3 V and 122 mS/mm transconductance, respectively. An HEMT analytical model was used to identify the effects of various material and device parameters on the InAIN/GaN REMT performance. It is concluded that the increase in the channel mobility is urgently needed in order to benefit from the high 2DEG density.

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Type
research article
DOI
10.1109/ted.2005.864379
Author(s)
Kuzmik, J.
•
Kostopoulos, A.
•
Konstantinidis, G.
•
Carlin, J. F.  
•
Georgakilas, A.
•
Pogany, D.
Date Issued

2006

Published in
Ieee Transactions on Electron Devices
Volume

53

Issue

3

Start page

422

End page

426

Subjects

GaN

•

InAIN/GaN

•

high-electron mobility transistors (HEMTs)

•

FIELD-EFFECT TRANSISTORS

•

ELECTRON-MOBILITY TRANSISTORS

•

ALGAN/GAN

•

HEMTS

•

GAN

•

INALN/(IN)GAN

•

SI3N4

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55091
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