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Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Vázquez-Mena, O.  
•
Villanueva, Guillermo  
•
van den Boogaart, M. A. F.  
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2007
33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007)

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

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Vazquez_2007_MNE.pdf

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